Browsing by Author "Yıldırım, S"

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Optical, electrical and microstructural properties of SiC thin films deposited by reactive dc magnetron sputtering

Tavşanoğlu, Tolga; Zayim, E O; Ağırseven, O; Yıldırım, S; Yücel, O (Elsevier Science Sa, 2019)

In this study, amorphous silicon carbide (SiC) thin films of variable compositions were deposited on Si (100) and glass substrates by reactive direct current magnetron sputtering of high purity silicon target, using CH4 ...