Konu "Bias Voltage" için Metalurji ve Malzeme Mühendisliği Bölümü Koleksiyonu listeleme
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Synthesis of c-axis oriented AlN thin films at room temperature
(Taylor & Francis Ltd, 2017)In this study, aluminium nitride (AlN) thin films were synthesised by plasma-enhanced reactive DC magnetron sputtering on glass and Si (100) substrates and the effect of bias voltages on the structural, optical and ...